Accession Number:

ADA235004

Title:

Bimonthly Report Number 8 for Micrion Corporation Contract N00014-89-C-2238

Descriptive Note:

Rept. for Feb-Mar 1991.

Corporate Author:

MICRION CORP PEABODY MA

Personal Author(s):

Report Date:

1991-04-11

Pagination or Media Count:

4.0

Abstract:

Descriptors:

• *REPAIR
• *MASKS
• PHOTOLITHOGRAPHY
• X RAYS
• HIGH RESOLUTION

Subject Categories:

• Machinery and Tools

Distribution Statement:

APPROVED FOR PUBLIC RELEASE