An Electron-Beam Dose Deposition Experiment: TIGER 1-D Simulation Code versus Thermoluminescent Dosimetry
Final rept. Jan-Sep 1989
HARRY DIAMOND LABS ADELPHI MD
Pagination or Media Count:
The dose absorbed in an integrated circuit IC die exposed to a pulse of low-energy electrons is a strong function of both electron energy and surrounding packaging materials. This report describes an experiment designed to measure how well the Integrated TIGER Series one-dimensional 1-D electron transport simulation program predicts dose correction factors for a state-of- the-art IC package and packageprinted circuit board PCB combination. These derived factors are compared with data obtained experimentally using thermoluminescent dosimeters TLDs and the FX-45 flash x-ray machine operated in electron-beam e-beam mode. The results of this experiment show that the TIGER 1-D simulation code can be used to accurately predict FX-45 e-beam dose deposition correction factors for reasonably complex IC packaging configurations.
- Electricity and Magnetism