Accession Number:

ADA231271

Title:

Preparation and Characterization of Chromium(III) Oxide Films by a Novel Spray Pyrolysis Method

Descriptive Note:

Technical rept.

Corporate Author:

BROWN UNIV PROVIDENCE RI DEPT OF CHEMISTRY

Report Date:

1990-12-21

Pagination or Media Count:

10.0

Abstract:

ChromiumIII oxide films of 2000A thickness were deposited on n-type silicon wafers by a novel spray pyrolysis method. Different spray solutions, all containing a chromium acetylacetonate complex, gave different rates of film deposition. IR spectroscopy of these films confirmed them to be alpha-Cr203. The deposited films of alpha-Cr203 were found to be homogeneous and uniform with breakdown potentials in excess of 20 V. The characteristics of films prepared from different spray solutions are compared and discussed.

Subject Categories:

  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE