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Accession Number:
ADA230810
Title:
Integrated Synthesis and Post Processing of Silicon Carbide and Aluminum Nitride
Descriptive Note:
Interim technical rept. 15 Sep 1989-14 Sep 1990
Corporate Author:
NORTH CAROLINA STATE UNIV AT RALEIGH DEPT OF MATERIALS SCIENCE AND ENGINEERING
Report Date:
1990-12-13
Pagination or Media Count:
4.0
Abstract:
Synthesis of nonoxide powders in a nonthermal microwave plasma was demonstrated, using SiC, Si3N4 and Si as model materials. Particle sizes are ultrafine, 2-5nm. Compositions and structures have been characterized. Equipment has been developed and characterized. Creep of polycrystalline AlN has been investigated for the first time. Mechanisms are identified.
Distribution Statement:
APPROVED FOR PUBLIC RELEASE