Accession Number:

ADA226438

Title:

Submicron Structures and Various Technology

Descriptive Note:

Progress rept.

Corporate Author:

MASSACHUSETTS INST OF TECH CAMBRIDGE RESEARCH LAB OF ELECTRONICS

Report Date:

1990-06-01

Pagination or Media Count:

93.0

Abstract:

Work by Prof. J. Allen and his collaborators is summarized here. Document complete per ARO. Submicron Structures Technology and Research. Microstructural Evolution in Thin Films of Electronic Materials. Chemical Reaction Dynamics at Surfaces. Measurement of Electron-phonon interactions through large-amplitude phonon excitation. Chemical beam epitaxy of compound semiconductors.

Subject Categories:

  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE