Accession Number:

ADA224905

Title:

DoD-URIP Thin Film Deposition Equipment. Phase 2

Descriptive Note:

Final rept.

Corporate Author:

IOWA STATE UNIV AMES

Personal Author(s):

Report Date:

1984-01-01

Pagination or Media Count:

6.0

Abstract:

A triple source ionized cluster beam deposition system was purchased and installed as part of a thin film research facility. A scanning auger system was added with university matching funds. Keywords Thin film storage devices, Ion beams.

Subject Categories:

  • Particle Accelerators

Distribution Statement:

APPROVED FOR PUBLIC RELEASE