Accession Number:

ADA224905

Title:

DoD-URIP Thin Film Deposition Equipment. Phase 2

Descriptive Note:

Final rept.

Corporate Author:

IOWA STATE UNIV AMES

Personal Author(s):

• Lakin, K. M.
• Shanks, H. S.

Report Date:

1984-01-01

Pagination or Media Count:

6.0

Abstract:

A triple source ionized cluster beam deposition system was purchased and installed as part of a thin film research facility. A scanning auger system was added with university matching funds. Keywords Thin film storage devices, Ion beams.

Descriptors:

• *ION BEAMS
• *THIN FILM STORAGE DEVICES
• RESEARCH FACILITIES
• AUGER ELECTRONS
• AUGER ELECTRON SPECTROSCOPY
• SCANNERS
• THIN FILMS
• ELECTRONIC SCANNERS

Subject Categories:

• Particle Accelerators

Distribution Statement:

APPROVED FOR PUBLIC RELEASE