Accession Number:
ADA224850
Title:
Solid-State Sensor and Actuator Workshop Held in Hilton Head Island, South Carolina on 4-7 June 1990
Descriptive Note:
Final rept.
Corporate Author:
CALIFORNIA UNIV BERKELEY
Personal Author(s):
Report Date:
1990-01-01
Pagination or Media Count:
197.0
Abstract:
Partial contents Quartz microbalance studies of solvent and ion transport in thin polymer films in sensor applications of the QCM Multiple- Frequency Surface Acoustic Wave Devices as Sensors Performance Characteristics of Second Generation Polysilicon Resonating Beam Force Transducers Friction and Wear in Microfabricated Harmonic Side-Drive Motors Electrostatically Balanced Comb Drive for Controlled Levitation A Micromachined Silicon Scan Tip for an Atomic Force Microscope Pressure Sensor Design and Simulation using the CAEMEMS-D Module Automatic Generation of a 3-D Solid Model of a Microfabricated Structure The Mechanism of Anisotropic Electrochemical Silicon Etching in Alkaline Solutions An Implantable CMOS Analog Signal Processor for Multiplexed Microelectrode Recording Arrays 2-D Magnetic Field Sensor Based on Vertical Hall Device Deep X-Ray Lithography for Micromechanics RF Telemetry Powering and Control of Hermetically-Sealed Integrated Sensors and Actuators Wide Dynamic Range Direct Digital Output Accelerometer A Multi-Element Monolithic Mass Flowmeter with On-Chip CMOS Readout Electronics Silicon Micromachining in the Fabrication of Biosensors Using Living Cells and Secondary Sensitivities and Stability of Ultrasensitive Silicon Pressure Sensors. Symposia.
Descriptors:
- *SOLID STATE ELECTRONICS
- *SURFACE ACOUSTIC WAVE DEVICES
- *MINIATURE ELECTRONIC EQUIPMENT
- *ACTUATORS
- *SOLID STATE PHYSICS
- *BIOLOGICAL DETECTION
- MACHINING
- SOLUTIONS(MIXTURES)
- HALL EFFECT
- THIN FILMS
- FABRICATION
- ELECTROCHEMISTRY
- ETCHING
- X RAYS
- MECHANICS
- LITHOGRAPHY
- ANISOTROPY
- SILICON
- POLYMERIC FILMS
- WEAR
- PRESSURE
- CELLS(BIOLOGY)
- FRICTION
- READ OUT TECHNIQUES
- AUTOMATIC
- RADIOFREQUENCY
- ANALOG SIGNALS
- WORKSHOPS
- ELECTRIC MOTORS
- ION EXCHANGE
- HERMETIC SEALS
- SLIDING CONTACTS
- ALKALINITY
- TELEMETER SYSTEMS
- DETECTORS
- SYMPOSIA
- INTEGRATED SYSTEMS
- ELECTRONICS
- HIGH SENSITIVITY
- SIGNAL PROCESSING
- SIMULATION
Subject Categories:
- Test Facilities, Equipment and Methods
- Solid State Physics