Accession Number:

ADA224850

Title:

Solid-State Sensor and Actuator Workshop Held in Hilton Head Island, South Carolina on 4-7 June 1990

Descriptive Note:

Final rept.

Corporate Author:

CALIFORNIA UNIV BERKELEY

Personal Author(s):

Report Date:

1990-01-01

Pagination or Media Count:

197.0

Abstract:

Partial contents Quartz microbalance studies of solvent and ion transport in thin polymer films in sensor applications of the QCM Multiple- Frequency Surface Acoustic Wave Devices as Sensors Performance Characteristics of Second Generation Polysilicon Resonating Beam Force Transducers Friction and Wear in Microfabricated Harmonic Side-Drive Motors Electrostatically Balanced Comb Drive for Controlled Levitation A Micromachined Silicon Scan Tip for an Atomic Force Microscope Pressure Sensor Design and Simulation using the CAEMEMS-D Module Automatic Generation of a 3-D Solid Model of a Microfabricated Structure The Mechanism of Anisotropic Electrochemical Silicon Etching in Alkaline Solutions An Implantable CMOS Analog Signal Processor for Multiplexed Microelectrode Recording Arrays 2-D Magnetic Field Sensor Based on Vertical Hall Device Deep X-Ray Lithography for Micromechanics RF Telemetry Powering and Control of Hermetically-Sealed Integrated Sensors and Actuators Wide Dynamic Range Direct Digital Output Accelerometer A Multi-Element Monolithic Mass Flowmeter with On-Chip CMOS Readout Electronics Silicon Micromachining in the Fabrication of Biosensors Using Living Cells and Secondary Sensitivities and Stability of Ultrasensitive Silicon Pressure Sensors. Symposia.

Subject Categories:

  • Test Facilities, Equipment and Methods
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE