Accession Number:

ADA224834

Title:

The Heat Cell

Descriptive Note:

Quarterly rept. no. 9

Corporate Author:

ILLINOIS UNIV CHAMPAIGN

Personal Author(s):

• Raccah, Paul M.

Report Date:

1983-01-01

Pagination or Media Count:

4.0

Abstract:

A cell was needed to modify the ellipsometer such that one can change the temperature of the sample in a well controlled atmosphere. A description of the design follows.

Descriptors:

• *CELLS
• *ELLIPSOMETERS
• HEAT
• CONTROLLED ATMOSPHERES

Subject Categories:

• Test Facilities, Equipment and Methods

Distribution Statement:

APPROVED FOR PUBLIC RELEASE