Growth Studies of CVD-MBE by In-Situ Diagnostics
Annual technical rept. 1 Jul 1989-30 Jun 1990
ARIZONA STATE UNIV TEMPE
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This is a progress report for the first year of the DARPA - URI program Growth Studies of CVD-MBE by in-situ Diagnostics. The goals of the program are to develop non-invasive, real time epitaxial growth monitoring techniques and combine them to gain an understanding of processes that occur during MBE growth from gas sources. We are developing and adapting these techniques on a commercially designed system Vacuum Generators Inc. to facilitate technology transfer out of the laboratory into industrial environments. Experimental results, when combined with a Monte Carlo simulation, should give some insight into the growth mechanisms that occur. Progress has been mostly in the construction of the in-situ diagnostic techniques and in modification of the gas source MBE. Several problems have been solved and we are now in a position to acquire data by three techniques spectroscopic ellipsometry SE, laser induced fluorescence LIF and RHEED.