Accession Number:

ADA224037

Title:

Mechanical Property Measurement of Polycrystalline Diamond Films

Descriptive Note:

Technical rept.

Corporate Author:

RAYTHEON CO LEXINGTON MA RESEARCH DIV

Personal Author(s):

Report Date:

1990-07-08

Pagination or Media Count:

11.0

Abstract:

The biaxial modulus and residual post deposition stress of polycrystalline diamond PCD films deposited by microwave plasma CVD is determined using the bulge test technique. This method involves measuring the deflection of a circular membrane under an applied differential pressure. A calibration parameter for the bulge test is determined by evaluating the biaxial modulus of a silicon specimen standard. The film is characterized using X-Ray diffraction. Preliminary results yield a biaxial modulus value of 960 GPa for the PCD film. jhd

Subject Categories:

  • Crystallography

Distribution Statement:

APPROVED FOR PUBLIC RELEASE