Accession Number:

ADA222881

Title:

Support for the Forty-Second Annual Gaseous Electronics Conference Held in Palo Alto, California on 16-20 October 1989

Descriptive Note:

Final rept.

Corporate Author:

SRI INTERNATIONAL MENLO PARK CA

Personal Author(s):

Report Date:

1990-05-07

Pagination or Media Count:

188.0

Abstract:

Contents Diagnostics of Processing Discharges, Hydrocarbon Plasmas, Kinetic Models, Electron Diffusion, Plasma Processing, Heavy Particle and Excited State Collisions, Workshop on the Reference System for RF Plasma Processing Research, Posters, Ionization, Laser Phenomena, Arcs and Glows, Electron and Heavy Particle Collisions, Posters, ArXe Lasers I, Breakdown and Switching, ArXe Lasers II, Cross Section Data I, Fundamental Data from Plasmas, Cross Section II, Posters, Novel Plasmas, Cross Sections I Wish I Knew, Single Wafer Plasma Processing, Collisions Between Atoms, Molecules, and Ions, RF discharges Models and Experiments, and Optical Diagnostics. rh

Subject Categories:

  • Plasma Physics and Magnetohydrodynamics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE