Accession Number:

ADA222827

Title:

Polar Coordinate Laser Writer for Binary Optics Fabrication

Descriptive Note:

Journal article,

Corporate Author:

MASSACHUSETTS INST OF TECH LEXINGTON LINCOLN LAB

Personal Author(s):

Report Date:

1990-02-01

Pagination or Media Count:

13.0

Abstract:

A Laser Writer system for recording centro-symmetric patterns in photoresist has been developed as an alternative method for binary optics mask and component fabrication. This system is capable of generating binary amplitude patterns with linewidths below 1 micron and with a positional accuracy of less than 0.1 micron on up to 3 in. diameter planar substrates. The measured wavefront error and diffraction efficiency of a direct-write two-phase-level F 10 lens confirm that high quality components can be fabricated quickly, easily, and at low cost. RH

Subject Categories:

  • Lasers and Masers

Distribution Statement:

APPROVED FOR PUBLIC RELEASE