DoD-University Research Instrumentation Program, FY 1986/FY 1987
Final rept. 15 Jul 1986-30 Dec 1989,
CALIFORNIA UNIV IRVINE DEPT OF ELECTRICAL ENGINEERING AND COMPUTER SCIENCE
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The objective of this DODAFOSR - University Research Instrumentation Program was to purchase and install a scanning electron microscope SEM system that is essential for examination and characterization of the detailed dimensions and structures of the integrated optic devices and modules that have been fabricated and explored. The SEM system acquired consists of the following major components Model SR-50A basic SEM system by Applied Beam, E-beam blanker unit, Model 5000-2 energy dispersive X-ray EDX system, Laserwriter, Closed loop water cooling system for the diffusion pump of the SEM basic system.