Accession Number:

ADA222257

Title:

"Influence of Stereochemistry on Radiation-Induced Structural Changes in PMMA"

Descriptive Note:

Technical rept.

Corporate Author:

RENSSELAER POLYTECHNIC INST TROY NY DEPT OF CHEMISTRY

Personal Author(s):

Report Date:

1990-05-31

Pagination or Media Count:

5.0

Abstract:

We have been studying the effects of radiation on polymethylmethacrylate, PMMA, which has been used as a resist in computer chip microlithography. In contrast to predictions based on solution photochemistry of related compounds we have found by careful spectroscopic study of the irradiation polymer leads to four different kinds of double bonds. These ester cleavage reactions do not necessarily lead to rupture of the backbone, a necessary condition for efficient use as a resist. We find evidence that not only does the state solution vs. film upon which irradiation is carried out affect the product distribution, but also that the stereochemistry of PMMA atactic vs. isotactic plays a role.

Subject Categories:

  • Physical Chemistry
  • Polymer Chemistry

Distribution Statement:

APPROVED FOR PUBLIC RELEASE