Accession Number:

ADA218547

Title:

Measurement of Localized Deep Levels and Wafer Non-Uniformities at 3-5 Semiconductor Heterojunctions

Descriptive Note:

Final technical rept. Dec 1986-Sep 1988

Corporate Author:

UNIVERSITY OF SOUTHERN CALIFORNIA LOS ANGELES

Personal Author(s):

Report Date:

1989-12-01

Pagination or Media Count:

99.0

Abstract:

Reported are the results of a two year program in which organic thin films were used to non-destructively study the properties of inorganic semiconductor epitaxial materials. The organic films can be applied to the substrate in vacuum in a non-destructive manner such that many bulk and surface properties of the semiconductor under study can be easily obtained. Once the characterization process is complete, the thin films can be removed without damage to the semiconductor substrate. This allows for the correlation of the fundamental materials properties of the semiconductor to the performance of devices fabricated on the same wafer.

Subject Categories:

  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE