Accession Number:

ADA218475

Title:

Theoretical Studies of Photochemical Methods for Semiconductor Etching

Descriptive Note:

Final rept. 1 Oct-30 Sep 1989,

Corporate Author:

CALIFORNIA UNIV SANTA BARBARA DEPT OF CHEMISTRY

Personal Author(s):

Report Date:

1990-01-01

Pagination or Media Count:

10.0

Abstract:

The general theme of the project is the use of photochemical methods for etching semiconductor surfaces or depositing metals on them. There are two aspects to this work a the photochemical process by which the desired molecular or atomic fragments are deposited on the surfaces and b the fate of the atoms once deposited e.g. motion of the atoms on the surface, island growth, sticking probabilities, etc. RRH

Subject Categories:

  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE