Accession Number:

ADA210190

Title:

Autonomous Control System for Czochralski Growth of LEC GaAs

Descriptive Note:

Final technical rept.

Corporate Author:

ARIZONA STATE UNIV TEMPE SEMICONDUCTOR MATERIALS RESEARCH LAB

Personal Author(s):

• Schwuttke, G. H.
• White, R. C.
• Luger, B.

Report Date:

1989-01-01

Pagination or Media Count:

29.0

Abstract:

The consolidation of the Czochralski Growth Control SystemCGCS is a revision of the hardware and software within the constraints of the first generation. The consolidation consists of a cabinet that is physically more compatible with the Cambridge console a more modular hardware arrangement that facilitates calibration, servicing, and expansion increased accuracy and stability of the system variable measurements and many software enhancements, including increased controller flexibility and improved diameter estimation and control. The hardware and software installation has been completed and crystal growth with complete digital control has been demonstrated. Keywords Liquid encapsulated crystal Single crystal Crystal growth Gallium arsenide.

Descriptors:

• *CRYSTAL GROWTH
• *CZOCHRALSKI CRYSTALS
• DIGITAL SYSTEMS
• MEASUREMENT
• CONTROL SYSTEMS
• GALLIUM ARSENIDES
• SINGLE CRYSTALS
• VARIABLES
• INSTALLATION
• ENCAPSULATION
• CALIBRATION
• CONTROL
• COMPUTER PROGRAMS
• ACCURACY

Subject Categories:

• Crystallography

Distribution Statement:

APPROVED FOR PUBLIC RELEASE