Accession Number:

ADA199180

Title:

Ohmic Contacts to Semiconducting Diamond

Descriptive Note:

Professional paper

Corporate Author:

NAVAL OCEAN SYSTEMS CENTER SAN DIEGO CA

Report Date:

1988-07-01

Pagination or Media Count:

3.0

Abstract:

Natural semiconducting diamond samples class II-b were used to develop techniques for the production of reproducible low-resistivity ohmic contacts for diamond devices. Annealed tantalum gold and titanium gold deposits on 100 polished diamond surfaces reduced the resistance by seven orders of magnitude relative to the as-received samples. The interfaces were characterized using metallography, scanning electron microscopy, and secondary ion mass spectrometry. Keywords Electronic devices, Diamond technology, Reprints.

Subject Categories:

  • Inorganic Chemistry

Distribution Statement:

APPROVED FOR PUBLIC RELEASE