Laser-Assisted Chemical Reactions of Organometallic Complexes at Surfaces.
Final rept. Aug 81-Aug 87,
HUGHES RESEARCH LABS MALIBU CALIF CHEMICAL PHYSICS DEPT
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The objectives of this research program are to investigate laser-assisted chemical reactions involving organometallic complexes for deposition of electronic materials at low temperatures. Specific areas of investigation are to 1 elucidate the kinetics and mechanisms of the photophysical and photochemical processes operative during laser-simulated dissociation of organometallic complexes and subsequent reaction of the photoproducts with a surface, 2 apply studies of photo-induced processes to the deposition of semiconductors, such as Gallium Arsenide, Aluminum Arsenide, and Gallium Aluminum Arsenide, and conductors such as Gold, and 3 establish experimental conditions under which epitaxial growth of the deposited materials can be achieved.
- Inorganic Chemistry
- Organic Chemistry