Accession Number:

ADA191240

Title:

Thin Film Research Diagnostics Instrumentation.

Descriptive Note:

Final rept. 1 Jan 85-30 Jun 86,

Corporate Author:

NEW MEXICO UNIV ALBUQUERQUE

Personal Author(s):

• McNeil,

Report Date:

1987-10-21

Pagination or Media Count:

3.0

Abstract:

All equipment purchased under this contract has been used for deposition and analysis of thin films. In particular, the Ar-ion laser is being used to investigate film scatter at multiple wavelengths. The excimer laser is being used to enhance deposition mechanisms it illuminates a coated surface throughout film disposition. The microscope and ellipsometer are part of diagnostics used to analyze films.

Descriptors:

• *DEPOSITION
• *THIN FILMS
• COATINGS
• ELLIPSOMETERS
• EXCIMERS
• FILMS
• FREQUENCY
• LASERS
• SCATTERING
• SURFACES

Subject Categories:

• Inorganic Chemistry

Distribution Statement:

APPROVED FOR PUBLIC RELEASE