Accession Number:

ADA190796

Title:

UV-Laser Reactions of Molecular Adsorbates.

Descriptive Note:

Final rept. 21 Aug 84-20 Aug 87,

Corporate Author:

MASSACHUSETTS INST OF TECH LEXINGTON LINCOLN LAB

Personal Author(s):

Report Date:

1987-12-27

Pagination or Media Count:

6.0

Abstract:

A technique has been developed for determining the surface diffusivity of a weakly bound adsorbate. Electron-beam-induced changes in the structure of partially amorphous CdS surfaces have been observed directly with atomic resolution. The interaction between a visible laser beam and compound semiconductors was studied a dynamic light-guiding effect which leads to the formation of single mode slab waveguides was identified. Thin films and single crystals of metal oxides were deposited by laser-induced photochemical reactions in gas-phase and adsorbed molecules. A surface halogenation techniques was developed for the photochemical etching of refractory metal films and was applied to in situ tuning of millimeter wave circuits. Laser-induced deposition of high purity tungsten was demonstrated and was applied to multi-level metallization and restructing of circuits. Keywords Lasers , Photochemistry, Surface reactions, Adsorbates, Etching, Metals, Semiconductors.

Subject Categories:

  • Radiation and Nuclear Chemistry
  • Electrical and Electronic Equipment
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE