Accession Number:

ADA190515

Title:

Nondestructive Moisture Measurement in Microelectronics.

Descriptive Note:

Final rept. Sep 85-Aug 86,

Corporate Author:

CLARKSON UNIV POTSDAM NY DIV OF RESEARCH

Personal Author(s):

Report Date:

1987-12-01

Pagination or Media Count:

54.0

Abstract:

This project was aimed at understanding moisture induced effects on materials used in microelectronic device manufacture. The approach chosen has been the use of state-of-the-art interdigitated surface conductivity test structures for characterizing the responses of microelectronic materials to ambient and condensed moisture, by performing nondestructive moisture measurements on both hermetically sealed and delidded packages. A test chamber and an appropriate electrical test setup have been developed for assessing the specificity, reproducibility and sensitivity of these effects. Keywords Moisture, Surface conductivity sensor, Nondestructive measurements, Adsorption physical models.

Subject Categories:

  • Test Facilities, Equipment and Methods
  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE