Accession Number:

ADA187335

Title:

Synthesis and Characterization of Thin Films.

Descriptive Note:

Final rept. 1 Sep 84-30 Nov 86,

Corporate Author:

IOWA STATE UNIV AMES MICROELECTRONICS RESEARCH CENTER

Personal Author(s):

Report Date:

1987-07-10

Pagination or Media Count:

371.0

Abstract:

This report summarizes a program which involved the installation of the individual systems of a major thin film facility and the results of initial film growth studies using the facility. Work in the growth of aluminum and germanium on silicon, germanium on gallium arsenide, and lithium niobate on silicon and sapphire is reported. Keywords Thin films, Depositions, Ionized cluster beam deposition LiNbO3 films, Ellipsometry.

Subject Categories:

  • Manufacturing and Industrial Engineering and Control of Production Systems
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE