GaAs Varactor Diode MMIC (Monolithic Microwave Integrated Circuit) Fabrication Technology.
ROYAL SIGNALS AND RADAR ESTABLISHMENT MALVERN (ENGLAND)
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The design criteria and techniques developed to fabricate a monolithic low series resistance N on N GaAs varactor diode and the associated microwave circuit are described. Details of a high resolution polyimide patterning process developed for this device are included as is a description of the experimental work carried out to establish the practical design rules for the polyimide dielectric on chip capacitors. A description of the seven level mask set and associated processing are included and an assessment of the yield obtained on several wafers is discussed. The processing technology described in this memo has been successfully transferred to UK industry.
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