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Choosing Polymer Solvents for Microlithography.
CORNELL UNIV ITHACA SCHOOL OF CHEMICAL ENGINEERING
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Criteria for choosing solvents for coatings and dissolution processes in microlithography include a Thermodynamic interaction measured by viscosity level, intrinsic viscosity, or swelling, b Dynamic interaction transport characterized by a diffusivity or some other rate process, such as rate of dissolution, c Volatility, control of removal, since the solvent is not a part of the final product, d Safety flammability and health hazards, and e Cost. Solvents based on ethylene oxide derivatives which contain both ether and ester linkages have been very useful in lithographic applications. However, health hazards such as fetatoxicity may be involved with such materials. In this work we found that PMAC 1-methoxy-2 propanol, acetate and EEP ethyl 3-ethoxy propionate are suitable replacements for two popular ethylene oxide-based solvents, namely, MCA 2-methoxyethyl acetate and ECA 2-ethoxyethyl acetate.
APPROVED FOR PUBLIC RELEASE