Accession Number:

ADA183022

Title:

Laser Processing of High-Tech Materials at High Irradiance.

Descriptive Note:

Memorandum rept.,

Corporate Author:

NAVAL RESEARCH LAB WASHINGTON DC

Personal Author(s):

• Whitlock,Robert R.

Report Date:

1987-05-13

Pagination or Media Count:

23.0

Abstract:

The major applications of lasers to the processing of high technology materials are briefly enumerated. It is found that the majority of these applications rely upon the direct thermal effects of irradiating the material with laser light. Several other important interactions of high irradiance lasers with materials are examined. The need for survey and evaluation of the capabilities of lasers to generate shocks for materials processing is underscored. Emphasis is placed on applications and potential applications of secondary processing, in which the particle or phonon emissions of a laser-produced plasma are employed in the materials processing steps. The demonstrated feasibility of using x-ray pulses from laser-produced plasmas for x-ray lithographic fabrication of microelectronics and microstructures is briefly reviewed. The possible application of laser evaporative desposition to the fabrication of novel materials, such as multilayers, superlattices, quantum devices microstructures, is proposed. Keywords Laser, Laser processing, Shock, High irradiance, X-ray lithography, Laser plasma, Evaporation, Deposition, Shock driver, Shock pressure, Flyer plate.

Descriptors:

• *LASERS
• *FABRICATION
• *LASER BEAMS
• THERMAL PROPERTIES
• MICROELECTRONICS
• RADIANCE
• MATERIALS
• PROCESSING
• DEPOSITION
• EVAPORATION
• FLYER PLATES
• PLASMAS(PHYSICS)
• PARTICLES
• MICROSTRUCTURE
• QUANTUM ELECTRONICS
• PRESSURE
• SHOCK
• PULSES
• X RAYS
• EMISSION
• PHONONS
• SECONDARY
• LITHOGRAPHY

Subject Categories:

• Lasers and Masers

Distribution Statement:

APPROVED FOR PUBLIC RELEASE