Accession Number:

ADA181445

Title:

Thin-Film Optoelectronic Circuits Research Program.

Descriptive Note:

Final technical rept. 1 Feb 85-31 Jan 87,

Corporate Author:

HONEYWELL INC BLOOMINGTON MN PHYSICAL SCIENCES CENTER

Personal Author(s):

Report Date:

1987-04-01

Pagination or Media Count:

49.0

Abstract:

The program objective has been to identify and investigate IC-compatible fabrication processes for thin-film optoelectronic circuits on GaAs. Single-mode channel waveguides of SiO2-ZnO-SiO2, SiO2-Al2O3-TaO2-SiO have been deposited on GaAs by ion-beam sputtering. Straight guides, curves, tapers, Y-branches, crossovers, and directional couplers have all been demonstrated. Novel concepts have been developed for integrated GaAs Schottky photodiodes and self-aligning fiber-to-waveguide couplers. An IC-compatible baseline fabrication process has been established and a photomask set has been completed for an optoelectronic circuit demonstration, including Mach-Zehnder interferometric modulators, delta-beta electro-optic switches, and integrated GaAs photodetectors. Keywords include Integrated Optics, Gallium Arsenide GaAs, Zinc Oxide ZnO, Electro-Optic Devices, and Thin-Film Waveguides.

Subject Categories:

  • Electrooptical and Optoelectronic Devices

Distribution Statement:

APPROVED FOR PUBLIC RELEASE