Crystal Growth and Mechanical Properties of Semiconductor Alloys.
Annual rept. 15 Apr 86-14 Apr 87,
STANFORD UNIV CA DEPT OF MATERIALS SCIENCE AND ENGINEERING
Pagination or Media Count:
The mechanical properties of semiconductor materials are related to changes in electronic and optical properties that may occur during the processing of materials into wafers and wafers into devices. Recent theoretical models related hardness in ternary semiconductor alloys to fundamental atomic properties, but few data are available. The report details the progress made in exploring methods for mechanical property studies of these alloys. Three approaches were used hardness measurements in thick films 10-100 micrometer using conventional microhardness, techniques hardness measurements in thin films less than 1 micrometer using a nanoindenter and the growth of bulk samples for use in conventional mechanical tests.
- Electrical and Electronic Equipment