Accession Number:

ADA180995

Title:

Theoretical Investigation of Homogeneous and Heterogeneous Reactions in the Chemical Vapor Deposition of Silicon from Silane.

Descriptive Note:

Final rept. 15 Jan 85-30 Sep 86,

Corporate Author:

OKLAHOMA STATE UNIV STILLWATER DEPT OF CHEMISTRY

Personal Author(s):

• Thompson,Donald L.

Report Date:

1987-01-15

Pagination or Media Count:

10.0

Abstract:

This report summarizes the computer equipment purchased on grant AFOSR-85-0115. The Scientific programs being supported by this equipment are described and finally a listing of all papers published since the acquisition of the computer is given. Keywords Computers Theoretical chemistry Silicon.

Descriptors:

• *SILICON
• *SILANES
• ACQUISITION
• COMPUTERS
• HETEROGENEITY
• THEORY
• CHEMICAL REACTIONS
• VAPOR DEPOSITION
• CHEMISTRY

Subject Categories:

• Organic Chemistry

Distribution Statement:

APPROVED FOR PUBLIC RELEASE