Accession Number:

ADA180218

Title:

Intense XUV (Extreme Ultraviolet) Radiation Sources.

Descriptive Note:

Annual rept. (Final) 1 Aug 83-31 Jul 85,

Corporate Author:

MARYLAND UNIV COLLEGE PARK INST FOR PHYSICAL SCIENCE AND TECHNOLOGY

Personal Author(s):

Report Date:

1985-07-31

Pagination or Media Count:

71.0

Abstract:

In the research, characterizations were performed of the Extreme Ultraviolet outpit of our laser produced plasma system in the 30-1200 A region and have used the system for preliminary studies in high resolution spectroscopy in the grazing incidence region and in soft x ray microlithography. Contents Laser Produced Plasma Light Sources XUV and soft x ray Radiation from Laser Produced Plasmas as Laboratory Spectroscopic Sources Laser Produced Plasma Light Sources for High Resolution XUV and VUV Spectroscopy Soft x ray Lithography using Radiation From Laser Produced Plasmas Laser Produced Plasma Light Sources for High Resolution XUV and VUV Spectroscopy High Resolution Spectra of Laser Plasma Light Sources in the Grazing Incidence Region and Photometric Investigation of a Laser Produced Plasma VUV Light Source.

Subject Categories:

  • Optics
  • Plasma Physics and Magnetohydrodynamics
  • Nuclear Physics and Elementary Particle Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE