IMPLNT-A Fortran Program to Calculate the Distribution of Implanted Ions Which Includes the Effects Due to Sputtering.
Interim rept. 1 May 81-9 Jan 86,
NAVAL RESEARCH LAB WASHINGTON DC
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The computer program IMPLNT has been written to study what happens as an ion beam is incident on a target. The target is divided into layers, and as each layers is sputtered away, the fraction of beam atoms to target atoms in the surface layers, as well as the distribution of beam atoms within the target are calculated. At present the program considers the beam ion incident onto a single element target. It takes account of the dilation of the target as beam ions are added to it, and also the change in range with the increase of beam atoms. A Gaussian distribution is used to distribute the beam ions within the target. Directions are given for running the program on the Division 4600 CMRSD VAX11780 and the NRL Cray front end VAX 11785. Keywords Ion implantation Sputtering Solid state.
- Computer Programming and Software
- Solid State Physics