Accession Number:

ADA179450

Title:

Computer-Aided Fabrication System Implementation

Descriptive Note:

Semiannual rept. 1 Oct 1986-31 Mar 1987

Corporate Author:

MASSACHUSETTS INST OF TECH CAMBRIDGE MICROSYSTEMS RESEARCH CENTER

Report Date:

1987-03-31

Pagination or Media Count:

54.0

Abstract:

The work under this contract is carried out in four areas. These are concerned with CAF system structure, process simulation and modeling, equipment modeling and simulation, and scheduling. Our CAF system, named CAFE Computer- Aided Fabrication Environment is in constant use in the MIT IC Laboratory. It currently runs on a VAX 785, but will shortly be ported to a Sun Microsystems computer. At this time the data base will be converted so it uses INGRES running on the Sun. A data model for VLSI fabrication facilities is currently under development. There are various type extensions, and the schema captures several important aspects of plant and process management. Progress has been made on the definition of a language for specifying process flows. Two-dimensional localized thermal oxidation has been modeled using a viscoelastic boundary element method. This model predicts higher than expected stress during oxidation, and hence possibly plastic deformation. The equipment modeling task is a new one. The objective is to develop executable machine models to be used for machine simulation. The models will deal with both nominal values and variances. A matrix experiment will be devised to test such models for LPCVD. A hierarchical framework for scheduling has been devised, in which different levels deals with different time horizons.

Subject Categories:

  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE