Accession Number:

ADA175794

Title:

Materials Research Society Symposia Proceedings. Volume 53. Semiconductor-on-Insulator and Thin Film Transistor Technology Held in Boston, Massachusetts on 3-6 December 1985,

Descriptive Note:

Final rept. 25 Nov 85-24 Nov 86,

Corporate Author:

MATERIALS RESEARCH SOCIETY PITTSBURGH PA

Personal Author(s):

Report Date:

1986-01-01

Pagination or Media Count:

493.0

Abstract:

The papers in this book have been arranged into five parts. The first three parts, Zone Melting and Recrystallization Heteroepitaxy and Porous Silicon, and Buried Oxide and Nitride by Implantation deal with specific approaches for fabricating Semiconductor on Insulator SOL material and structures. The last two parts, Characterization of SOL Thin Films and Device and Circuit Applications, are more general in scope. Keywords Symposia Silicon Oxides Nitrides Semiconductors Insulators Thin Film Transistors Zone Melting Recrystallization.

Subject Categories:

  • Electrical and Electronic Equipment
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE