Multipoint Auger Depth Profiling System.
AEROSPACE CORP LOS ANGELES CA CHEMISTRY AND PHYSICS LAB
Pagination or Media Count:
A computer-based control system for the scanning Auger microprobe SAM is described that greatly enhances laboratory capabilities to characterize microelectronic devices. Programs under way are designed to improve the reliability of gallium arsenide field effect transistors through a study of degradation resulting from diffusion of contact metallization. These studies depend on determining elemental compositions as a function of depth depth profiling in various regions of devices after the devices are subjected to electrical and thermal stress. The SAM data handling system cannot process data originating at more than one point. This constraint severly limits the depth profiling capability of the SAM as applied to microelectronic devices. Laboratory personnel have developed a computerized control system to depth profile a specimen at a number of different points simultaneously. This capability will provide information on the distribution of chemical elements in three dimensions needed to study device degradation. Data illustrating the capability of the computerized profiling system are presented.
- *SEMICONDUCTOR DEVICES
- DATA PROCESSING
- CONTROL SYSTEMS
- GALLIUM ARSENIDES
- ELECTRICAL PROPERTIES
- SUBMINIATURE ELECTRONIC EQUIPMENT
- COMPUTER APPLICATIONS
- THERMAL STRESSES
- CHEMICAL ELEMENTS
- AUGER ELECTRONS
- Electrical and Electronic Equipment