Materials Research Society Symposia Proceedings. Volume 29. Laser- Controlled Chemical Processing of Surfaces Held on 14-16 November 1983 in Boston, Massachusetts.
Final rept. 1 Nov 83-31 Jul 84,
MATERIALS RESEARCH SOCIETY UNIVERSITY PARK PA
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On the dates of the 14th to the16th of November 1983, as part of its annual meeting in Boston, MA, the Materials Research society sponsored a symposium, Laser- Controlled Chemical Processing of Surfaces . The symposium was the Second Annual MRS event organized around the evolving field of materials processing by chemistry induced with laser radiation. This a field which is rapidly expanding to include a diverse variety of methods of activating or confining reaction for film deposition, etching, or doping of solid surfaces. The volume is organized according to the main topic areas of the symposium. The first section is devoted to laser-chemical-vapor-deposition reactions, driven thermally by pyrolysis or by dominantly thermal surface treatment. This includes reactions, variously termed LCVD and laser pyrolytic. A second section is structured around primarily photochemical or non-thermal photo deposition reactions. Electrochemistry driven by lasers is covered in the third section. The fourth section covers dry etching processes only. A fifth section includes papers from the expanding applications of laser methods for analysis of deposition and etching processes. In the sixth section, we include processes that are not easily classified within the preceding sections. A final section covers papers that are mainly analytic.
- Industrial Chemistry and Chemical Processing
- Lasers and Masers
- Solid State Physics