Accession Number:

ADA172422

Title:

High and Low Energy Particle Beams Interactions with Solids.

Descriptive Note:

Final rept.,

Corporate Author:

PENNSYLVANIA STATE UNIV UNIVERSITY PARK DEPT OF CHEMISTRY

Personal Author(s):

• Winograd, Nicholas

Report Date:

1986-01-01

Pagination or Media Count:

8.0

Abstract:

The major goal of this research has been to establish a center for the preparation and surface characterization of advanced materials related to the construction of high speed electronic devices. The focal point of the experimental side of our center has been a molecular beam epitaxial MBE growth facility directly attached to a sophisticated surface analysis system. The growth facility has been initially set up to study the chemical aspects of interface formation during the fabrication of multilayer systems. The analysis chamber incorporates a number of novel approaches to characterizing the chemistry of these interfaces with unprecedented detail. These include LEED, XPS, angle resolved SIMS and Helium atom diffraction. On the theoretical side, our goal has been to establish extensive computational hardware and software for the modeling of the interaction of energetic particles with solids. This project has involved the development of interaction potentials which accurately predict forces between atoms in materials with directional bonding such as Gallium Arsenide and Silicon.

Descriptors:

• *SURFACE ANALYSIS
• *EPITAXIAL GROWTH
• COMPUTER PROGRAMS
• MODELS
• INTERACTIONS
• INTERFACES
• LAYERS
• HIGH VELOCITY
• GALLIUM ARSENIDES
• ELECTRONIC EQUIPMENT
• FABRICATION
• ATOMS
• SOLIDS
• MOLECULAR BEAMS
• PARTICLES
• DIFFRACTION
• LOW ENERGY
• X RAY PHOTOELECTRON SPECTROSCOPY
• SILICON
• BONDING
• HELIUM
• SURFACE CHEMISTRY
• RESEARCH MANAGEMENT
• ELECTRON DIFFRACTION
• DIRECTIONAL
• MASS SPECTROMETRY

Subject Categories:

• Crystallography
• Atomic and Molecular Physics and Spectroscopy
• Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE