PH-Sensitive WO(3)-Based Microelectrochemical Transistors.
Interim technical rept.,
MASSACHUSETTS INST OF TECH CAMBRIDGE DEPT OF CHEMISTRY
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Electrochemical properties of an array of closely spaced 1.2 micron Au or Pt microelectrodes approx. 2 micron wide x approx. 50 micron long x 0.1 micron high coated by a 0.15 micron thick layer of polycrystalline W03 are reported. The W03 is deposited on the electrodes by rf sputtering of a W03 target. The cyclic voltammetry of these microelectrodes indicates that W03 connects individual microelectrodes, since the voltammogram of a pair of microelectrodes driven together is indistinguishable from that of an individual microelectrode. W03 becomes a good conductor upon electrochemical reduction in aqueous solutions. The change in resistance of W03 connecting two microelectrodes as a function of electrochemical potential spans four orders of magnitude.
- Physical Chemistry
- Electrical and Electronic Equipment