Accession Number:

ADA170837

Title:

Direct Writing of Microstructures for Solid-State Electronics

Descriptive Note:

Final rept. 1 Feb 1984-31 Jan 1986

Corporate Author:

COLUMBIA UNIV NEW YORK DEPT OF ELECTRICAL ENGINEERING

Personal Author(s):

Report Date:

1986-04-19

Pagination or Media Count:

55.0

Abstract:

This report summarizes two years of research on new laser processing techniques on opto- and microelectronics. The main results are in 1 the demonstration of UV laser direct writing of low resitivity metal lines, and the subsequent demonstration of the usefulness of laser writing via deposition in the reconfiguring of an LSI circuitry and 2 the discovery, characterization, and understanding of the techniques of light-guided etching for the fabrication of ultra-high-aspect-ratio microelectronics structures. In the case of light- guided etching, an application of the technique to optical interconnects has already been demonstrated. Author

Subject Categories:

  • Electrical and Electronic Equipment
  • Lasers and Masers

Distribution Statement:

APPROVED FOR PUBLIC RELEASE