Accession Number:

ADA170782

Title:

Laser Produced X-Ray for High Resolution Lithography and a Photoionization Laser.

Descriptive Note:

Final rept.,

Corporate Author:

BATTELLE COLUMBUS DIV OH

Report Date:

1986-02-14

Pagination or Media Count:

83.0

Abstract:

The majority of the project was spent investigating laser produced x rays for high resolution lithography. This work involved measurements over an extensive parameter matrix. Specifically, efficiency of conversions to x rays was qualified as a function of 1 laser pulse energy, 2 laser pulse width, 3 plasma profile, 4 laser wavelength, 5 target atomic number, 6 initial focal area, and 7 focal ratio of the lens. Experimental research was performed on a photoionization x ray laser concept. Specifically, a thin polyethylene, oxidicarbonate film was vaporized. Fifteen nanoseconds into its expansion, the vapor was illuminated by a 200 psec Fe spectrum x ray pulse. Photoionization of the inner K shell of oxygen was then observed. The potential efficiency of this type of laser was found to be comparatively low.

Subject Categories:

  • Lasers and Masers
  • Printing and Graphic Arts
  • Nuclear Physics and Elementary Particle Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE