Laser Produced X-Ray for High Resolution Lithography and a Photoionization Laser.
BATTELLE COLUMBUS DIV OH
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The majority of the project was spent investigating laser produced x rays for high resolution lithography. This work involved measurements over an extensive parameter matrix. Specifically, efficiency of conversions to x rays was qualified as a function of 1 laser pulse energy, 2 laser pulse width, 3 plasma profile, 4 laser wavelength, 5 target atomic number, 6 initial focal area, and 7 focal ratio of the lens. Experimental research was performed on a photoionization x ray laser concept. Specifically, a thin polyethylene, oxidicarbonate film was vaporized. Fifteen nanoseconds into its expansion, the vapor was illuminated by a 200 psec Fe spectrum x ray pulse. Photoionization of the inner K shell of oxygen was then observed. The potential efficiency of this type of laser was found to be comparatively low.
- Lasers and Masers
- Printing and Graphic Arts
- Nuclear Physics and Elementary Particle Physics