Multilayer Capacitor Dielectrics Produced from Metallo-Organic Precursors.
Annual rept. 1 Mar 85-31 Mar 86,
PURDUE UNIV LAFAYETTE IN TURNER LAB FOR ELECTROCERAMICS
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The metallo-organic decomposition MOD process for preparing films or powders has a number of advantages over conventional processes. The metallo-organic compounds used in the present study had oxygen as the hetero atom to bond a metal atom to an organic ligand. These compounds were each dissolved in an appropriate solvent and the solutions mixed to achieve the desired stoichiometry. After adjusting the rheology, the formulation was deposited on an appropriate substrate to make a film or contained in a platinum dish to make a powder, and pyrolyzed too yield the inorganic product. Since the mixing of the starting materials is on the molecular level, the inorganic species exist as atoms or molecules in intimate contact immediately after decomposition. This leads to much more rapid formation of compounds and sintering of films, which translates to lower temperature processing of equilibrium phases and more dense films.
- Inorganic Chemistry
- Organic Chemistry
- Electrical and Electronic Equipment
- Manufacturing and Industrial Engineering and Control of Production Systems