Report on an Interlaboratory Electromigration Experiment,
STANFORD UNIV CA
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Electromigration is a metallization failure mechanism that is of concern for Very Large Scale Integration reliability. Ambiguities exist in the electromigration characterization of metallizations. These ambiguities are, in general, due to the different test structures and measurement methodss used and to the incomplete reporting of the results from such characterizations. An interlaboratory experiment has been organized to address this problem. The purpose of the experiment is to assess the reproducibility of electromigration characterizations and to establish the technical base needed to develop guidelines for the design of electromigration test structures, for methods to measure the median time to failure of metallizations, and for reporting characterization measurements.
- Electricity and Magnetism
- Solid State Physics