Ion Acoustic Microscopy
Final rept. Jul 1983-Jun 1984
GEORGIA TECH RESEARCH CORP ATLANTA
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This report details the modifications to an existing ion implanter which were made in order to use it for ion acoustic microscopy. Results are described of tests of the technique on samples of cubic zirconia implanted with nitrogen ions. The utility of the technique for monitoring the progress of implantation in metals and ceramics is discussed. Keywords Ion acoustic microscopy photoacoustic microscopy Thermal wave imaging Zirconia Ion Implantation.
- Ceramics, Refractories and Glass
- Test Facilities, Equipment and Methods