Surface Depletion Correction to Carrier Profiles by Hall Measurements.
AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OH SCHOOL OF ENGINEERING
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A method was developed for correcting a carrier profile by Hall Measurements for the surface depletion effect. The method assumes that the experimental data is to be fit with a Pearson type-IV curve. In order to correct the measured profile it is necessary to know the depletion width after each etch. The depletion widths are dependent upon the real profile and not the measured, therefore if one only has measured data, the depletion width cannot be directly determined. In order to gain insight into the problem a procedure called reverse correction is developed. It creates a measured profile from a real profile. The method for correction is the following. First assume a real profile is known. Calculate the depletion widths from this profile. From these depletion widths and the Pearson type-IV fit to the original measured data construct a new assumed real profile. Repeat this procedure self-consistently until convergence of the assumed real data to a stable profile. This is the true profile. Convergence is expected in approximately 7 iterations. A BASIC program is included which corrects a measured hall profile by finding an appropriate and self-consistent set of depletion widths. Keywords Hall effect.
- Solid State Physics