Quality Procedures for VLSI/VHSIC (Very Large Scale Integrated and Very High Speed Integrated Circuits) Type Devices.
Final rept. Sep 83-Sep 85,
ITT ADVANCED TECHNOLOGY CENTER SHELTON CT
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Procedures for microcircuit screening and qualification to ensure the reliability and uniformity of VLSIVHSIC devices were prepared on this effort. The use of Process Control Monitors PCM and Reliability Evaluation Modules REM were incorporated in the procedures. In addition, recommended guidelines for the evaluation of Computed-Aided-Manufacturing CAM facilities were generated in this study. A proposed replacement was provided for existing Method 5007 to MIL-STD-883, Wafer Acceptance Procedure which incorporates reliability screening, process quality evaluation, and electrical parameter testing of each wafer in a lot. Keywords Very Large Scale Integrated and Very High Speed Integrated Circuits, Line Certification, and Qualification Procedures.
- Electrical and Electronic Equipment