Investigation and Development of Advanced Surface Microanalysis Techniques and Methods
Final technical rept. 1 Apr 1983-30 Sep 1985
EVANS (CHARLES) AND ASSOCIATES SAN MATEO CA
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The goals of this research program were two-fold 1. Improve the sensitivity and quantitative capabilities of existing surface microanalysis techniques operating in the 1 to 150 micrometer lateral dimension regime and 2. Investigate and evaluate techniques for obtaining trace level analyses of materials down to the 0.1 micrometer lateral dimension. This research program produced several results in the advancement of quantitation and detection limits of the two most widely used microanalytical techniques, scanning Auger microscopy SAM and secondary ion mass spectrometry SIMS. This concept was developed and tested on the characterization of borophosphosilicate glass BPSG passivations and intermetal dielectrics. Three approaches were evaluated for the improvement of trace element detection limits. The first was to determine whether the laser enhancement concepts of resonant and nonresonant multiphonon ionization. The second approach to improved trace element detection limits was to thoroughly evaluate the analytical methodologies of specific impuritymatrix combinations relating to a particular technology. The third approach for enhanced trace component analysis was the evaluation of evolving microanalytical techniques which provide these improved quantitation or detection limits.
- Atomic and Molecular Physics and Spectroscopy