Accession Number:

ADA162752

Title:

MASTIF (MIT Analysis and Simulation Tools for IC Fabrication) - A Workstation Approach to Fabrication Process Design,

Descriptive Note:

Corporate Author:

MASSACHUSETTS INST OF TECH CAMBRIDGE DEPT OF ELECTRICAL ENGINEERING AND COMPUTER SCIENCE

Report Date:

1985-09-01

Pagination or Media Count:

9.0

Abstract:

The design of a fabrication process increasingly necessitates the availability and use of a variety of tools, including process and device simulation, analysis, and synthesis aids. The MASTIF workstation MIT Analysis and Simulation Tools for IC Fabrication is a menu and window oriented program written in C and Fortran which provides a methodology and uniform software structure for the connection of process and device design tools. MASTIF currently includes a facility for incremental development and version management of a process description, management mechanisms for definition of physical cross sections deriving from the overall process description, and an interactive graphics interface and data interchange for process and device simulators SUPREM-III and MINIMOS. With MASTIF, the user can effectively develop and evaluate a fabrication process via a single integrated workstation. Keywords Computer aided design. Author

Subject Categories:

  • Computer Programming and Software
  • Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE