Infrared Detector Research Metal Film Bolometer Detectors. Part 3. Preparation and Performance
ELECTRONICS RESEARCH LAB ADELAIDE (AUSTRALIA)
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This report describes the preparation and performance of metal film bolometer infrared detectors using a versatile fabrication technology for both single-element detectors and focal plane arrays. Detectors are prepared on conventional semiconductor-grade silicon substrates and extensive use is made of state-of-the-art microcircuit manufacture techniques. A detectivity of approx. 2 x 10 to the 8th power cm. sq. root of Hz. per watt and speed of response of or to 1 ms can be achieved, for detector element sizes as small as 50 micron. Recipients are warned that information contained in this document may be protected by patent rights.
- Test Facilities, Equipment and Methods
- Infrared Detection and Detectors