Spectroscopic Diagnostics to Support Advanced Microelectronic Fabrication Techniques.
Annual technical rept. 1 Apr 84-1 Apr 85,
AERODYNE RESEARCH INC BILLERICA MA
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This is the first annual report on a program to develop laser spectroscopic diagnostics for detection of gas phase species important in fabrication processes for advanced semiconductor materials. It has two objectives, to obtain quantitative spectroscopic data for these molecules, and to apply diagnostics to model fabrication systems. This report summarizes progress in the areas of investigation identified in the first year chlorine atom detection using an infrared tunable diode laser, which will also be used to instrument a plasma etching reactor, and infrared and laser induced fluorescence spectroscopic studies of SiF2, CF2, and SiH2. Keywords include Diagnostic Instrumentation, Electronic Materials, Infrared Absorption, Lasers, Laser-Induced Fluorescence, Microelectronic Fabrication, Semiconductor Processing, and Spectroscopy.
- *TUNABLE LASERS
- *LASER INDUCED FLUORESCENCE
- *DIAGNOSTIC EQUIPMENT
- ELECTRONIC EQUIPMENT
- VAPOR PHASES
- INFRARED LASERS
- INFRARED RADIATION
- Lasers and Masers
- Test Facilities, Equipment and Methods
- Atomic and Molecular Physics and Spectroscopy
- Solid State Physics