Accession Number:

ADA160155

Title:

Evaluation of Ion Microscopic Spatial Resolution and Image Quality.

Descriptive Note:

Technical rept.,

Corporate Author:

CORNELL UNIV ITHACA NY BAKER LAB

Report Date:

1985-09-16

Pagination or Media Count:

4.0

Abstract:

This study of factors that influence image quality in the ion microscope will motivate modification of the existing configuration in order to improve the lateral resolution and the absolute sensitivity. The micro-test patterns provide an absolute scale of image evaluation and thus are used to characterize the imaging capabilities of the SIMS analyzer. The efforts anticipate the decreasing dimensions of the next generation of submicron structures. Additional keywords spectroscopy analytical chemistry. Author

Subject Categories:

  • Test Facilities, Equipment and Methods
  • Particle Accelerators

Distribution Statement:

APPROVED FOR PUBLIC RELEASE