Evaluation of Ion Microscopic Spatial Resolution and Image Quality.
CORNELL UNIV ITHACA NY BAKER LAB
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This study of factors that influence image quality in the ion microscope will motivate modification of the existing configuration in order to improve the lateral resolution and the absolute sensitivity. The micro-test patterns provide an absolute scale of image evaluation and thus are used to characterize the imaging capabilities of the SIMS analyzer. The efforts anticipate the decreasing dimensions of the next generation of submicron structures. Additional keywords spectroscopy analytical chemistry. Author
- Test Facilities, Equipment and Methods
- Particle Accelerators