Accession Number:

ADA159482

Title:

Studies of Dissolution Phenomena in Microlithography.

Descriptive Note:

Technical rept.,

Corporate Author:

CORNELL UNIV ITHACA SCHOOL OF CHEMICAL ENGINEERING

Report Date:

1985-09-05

Pagination or Media Count:

13.0

Abstract:

Laser interferometry is useful for measuring the dissolution rate of thin polymer films. During the dissolution process, polymer in the glassy state is transported into a dilute solution. In some cases, a transition layer can be measured using laser interferometry. This layer is seen as a difference in reflected light intensity between the bare substrate and the maximum during dissolution. When PMMA dissolves in methyl ethyl ketone, the layer is not detectable below a polymer M subscript n of about 30,000. The layer becomes more pronounced as molecular weight of polymer increases.

Subject Categories:

  • Plastics
  • Printing and Graphic Arts
  • Optics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE