Studies of Dissolution Phenomena in Microlithography.
CORNELL UNIV ITHACA SCHOOL OF CHEMICAL ENGINEERING
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Laser interferometry is useful for measuring the dissolution rate of thin polymer films. During the dissolution process, polymer in the glassy state is transported into a dilute solution. In some cases, a transition layer can be measured using laser interferometry. This layer is seen as a difference in reflected light intensity between the bare substrate and the maximum during dissolution. When PMMA dissolves in methyl ethyl ketone, the layer is not detectable below a polymer M subscript n of about 30,000. The layer becomes more pronounced as molecular weight of polymer increases.
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